Engineers and technicians
2 900 sqm
cleam room facilities
Research projects in progress
The C2N Technological Facilities
The C2N Technological Facility are hosted in a clean room of 2 900 sqm, dedicated to micro and nanofabrication processes, to the growth, the epitaxy and the characterization of materials. Some areas are also devoted to education and continuous training in micro-nanotechnologies, and 250sqm are dedicated to start-up or SME activities. In a whole, more than 50 M€ are invested in state-of-the-art equipment for micro-nanotechnologies and 40 engineers and technicians work in 3 platforms: PIMENT, POEM and PANAM.
The C2N Technological Facilities are an essential tool for research carried out in the laboratory. It is also part of the French network of large high-end facilities (RENATECH) coordinated by the CNRS to support research and innovation in the field of micro-nanotechnologies at the national level. The plant hosts more than two hundred technological projects, of which roughly a quarter are carried by external laboratories, both academic and industrial. Running projects dealing with epitaxy of materials, their chemical and structural analysis, and micro-nanofabrication rely on the expertise of C2N.
The PIMENT platform provides a complete set of state-of-the-art, high-performance equipments for research ranging from fundamental quantum physics to advanced integrated devices or micro-nanosystems. The staff is in charge of the development of processes required for the laboratory research activities.
The platform was organized into four main poles corresponding to key technologies: lithography, etching, thin film deposition and measurement/control.
The Platform for Elaboration of Materials (POEM) accommodates equipments for the crystalline growth of thin layers and nanostructures of IV-IV and III-V semiconductors, two-dimensional materials (2D) and functional oxides. The available techniques are molecular beam epitaxy (MBE), metalorganic vapor phase epitaxy (MOVPE), chemical vapor deposition (CVD) at low-pressure atmospheric pressure or under ultra-high vacuum (UHV-CVD), pulsed laser deposition (PLD) and gas immersion laser doping (GILD).
The platform provides a very large variety of structures, such as III-V quantum dots, GaN nanowires, microcavities, high mobility 2D electron gases (2DEG) for quantum transport, nanoelectronic and photonic studies. These heterostructures are designed and realized for the research activities of the different teams of C2N, as well as for national or international projects. The platform also carries out instrumentation developments, in order to expend the family of materials or combinations of materials, and to provide in situ analyses to explore growth mechanisms.
The PANAM platform hosts equipment and know-how in structural and chemical analysis. The resources are X-ray diffraction, advanced transmission electron microscopy, microanalysis and atomic force microscopy.
Structural (crystalline and morphological) and chemical analyzis at the atomic scale are carried out to understand the growth mechanisms of nanostructures and to correlate their structural properties with their functional properties (electronics, optics, magnetism) in close contact with the research teams of the C2N and other academic and industrial partner laboratories.