Measurement of force-displacement curve

• 3 axes

• Force: 5 nN to 10 mN according to probe

• Probe size: 50 μmx50 μm

• Displacement: 5 nm-26 mm (repeatabilité large displacement 100nm)

• Scan:1.5mm, step: 50-500 nm

• Various probes: +/-100μN, +/-1000 μN,...

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