The "MicroSystems and NanoBiofluidics" Department gathers three research groups. The department's research activity focuses on the study and design of innovative micro / nano devices, the development of micro-nano-fabrication processes, the development and integration of instrumentation associated with devices, and the characterization of the devices made. The scientific activity developed is often motivated by issues from the socio-economic world; it is prospective but also has many applications in industrial contexts or in the field of life sciences and health. The activity is conducted with strong links with national and international industrial and academic partners, in the form of direct collaborations or through institutional projects. 

The “Microsystems and Nanobiofluidics” Department (MNBF) results from the merging of the “Microsystems” department of former IEF (Orsay) and the “NanoFlu” group of former LPN (Marcoussis). This merging outcomes from complementary skills and expertises of the two former teams, both involved in the development of technological micro/nanofabrication processes of devices. It also outcomes from some shared scientific pluridisciplinary methodology and objectives, especially regarding the biomedical engineering field. Today, MNBF gathers researchers and academic staff with pluridisciplinary skills, mainly centered in the electrical engineering field, which allow covering theoretical and experimental aspects in a wide scientific domain which includes applied physics, material sciences, micro/nano fabrication, physico-chemical and biochemical processes, sensing and actuation phenomena and devices, multiphysics characterization, electrical engineering and data processing. Thanks to its ability to develop innovative micro/nanostructured systems based on either wafer-scale semiconductors or new emerging soft processing techniques, MNBF is involved in the study of micro/nanodevices, ranging from physical electro and/or mechanical microsystems to analytic micro/nanofluidic biodevices. The research activity at MNBF is highly prospective, but also finds many applicative opportunities in the socio-economical world, in domains such as aeronautics, consumer devices, telecommunications, security, energy harvesting, microrobotics, or biomedical applications including diagnosis and therapeutic follow-up devices. MNBF is currently headed by P.-Y. Joubert and co-headed by A.-M. Haghiri. It is organized and scientifically structured based on 3 main research topics: 1/ MEMS and Instrumentation, 2/ Microsystems for medical applications and 3/ SmartBiosystems, the latter involving people issued from the two former laboratories. These topics are animated by J. Moulin, M. Woytasik and G. Hwang, respectively.

Research groups:




October 2018:  Lettre Innovation CNRS for electromechanical energy harvesting.

Key Figures

3 research groups
6 CNRS research members
15 faculty members

22 ph.d students

Department managers

JOUBERT Pierre-Yves

Tel : (+33) 1 70 27 06 53